Batch-microfabricated Arrays of Electrospinning Emitters for High Throughput Generation of Nanofibers

We report the design, fabrication, and experimental characterization of an externally-fed, silicon batchfabricated MEMS electrospinning planar array with as many as 9 steady-operating emitters in 1 cm – more than a 7-fold increase in emitter density compared to state-of-the-art MEMS multiplexed electrospinning sources. The device simultaneously generates multiple nanofiber jets at 20 kV or less bias voltage by using an array of pointed emitters that enhance the local electric field to trigger the ionization of the polymer solution at the emitter tips. The surface of the emitters is patterned with a microstructure that enables the delivery of polymer solution to the emitter tips without the need for external pumping. SEM images confirm fiber diameters on the order of 150 nm, which are comparable to those produced by other electrospinning techniques.